Smart-Trak 50 Series medium flow controller increases the maximum flow range of the award-winning Smart-Trak 50 Series from 50 slpm to 200 slpm. The 50 Series has a standard accuracy of ±1.5% of full scale that works for nearly all common semiconductor purge and carrier gases. A flexible and powerful direct-acting frictionless-hovering control valve sets it apart from the competition by minimizing leak-by, while offering ±0.25% repeatability.
